関連: 先進製造技術
ISO16232規格に準拠した精密製造プロセスのSEM/EDSベースの自動清浄度制御
Manufacturing cleanliness is critical in many areas of advanced manufacturing. Oxford Instruments have been actively involved in the development and evolvement of solutions for contamination control and particle analysis in many different manufacturing settings ranging from automotive manufacturing, to semiconductor and hard disk drives and batteries. In many of these areas, microscopic particles introduced at any point in the supply chain and the manufacturing process can have detrimental effects on product performance. Our range of scanning electron microscopy and EDS based products for automated particle analysis such as AZtecFeature (link), AZtecClean (link) and AZtecHPA (link) can help identify the source of contaminant particles and avoid costly product recalls or yield issues in the manufacturing process.